Performance Analyses of Micromirror Devices

ABSTRACT

The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.

TECHNICAL FIELD OF THE INVENTION

This application is a divisional of application Ser. No. 10/875,760,filed Jun. 23, 2004.

The present invention relates to the field of microelectromechanicaldevices, and more particularly to methods and apparatus of performanceevaluations through measurements of electromechanical responses of themicromirror devices to driving forces.

BACKGROUND OF THE INVENTION

Microelectromechanical (MEMS) devices have found many applications inbasic signal transductions. For example, MEMS-based spatial lightmodulators are transducers that modulate incident light in a spatialpattern in response to optical or electrical inputs. The incident lightmay be modulated in phase, intensity, polarization, or direction. Thismodulation may be accomplished through the use of a variety of materialsexhibiting magneto-optic, electro-optic, or elastic properties. Suchspatial light modulators have many applications, including opticalinformation processing, display systems, and electrostatic printing.

A micromirror-based spatial light modulator is a spatial light modulatorconsists of an array of micromirrors. The mirror plates are individuallyaddressable and deflectable with electrostatic fields so as to modulateincident light. A typical micromirror device comprises a deformablereflective mirror plate held by a deformable hinge such that the mirrorplate can rotate to different positions in response to driving forces,such as electrostatic field. According to the different rotationpositions, operation states, such as ON and OFF states in a binaryoperation mode are defined. In the ON state, incident light is reflectedso as to produce a “bright” pixel on a display target, and in the OFFstate, incident light is reflected to produce a “dark” pixel on thedisplay target. In an application of displaying an image represented byimage pixels having “bright” and “dark” values, the micromirrors areassociated with the image pixels, and the micromirrors are individuallyset to the ON or OFF states according to the “bright” or “dark” valuesof the image pixels associated with micromirrors. The collective effectof the reflection from the micromirrors at the ON and OFF states for agiven incident light is reproduction of the image on the display target.The same operation mechanism is applied to display applications forcolor images and videos. The color image display is often performed witha color wheel that generates the primary colors or the like. Videodisplay applications are often performed with a sequential color fieldtechnique which requires the micromirrors be rotated rapidly andfrequently between the ON and OFF state so as to reflect the appropriate“brightness” variation of the image pixels. In either application ofimage and video display applications, robust electromechanical responsesto the driving forces and uniform ON and OFF states of the micromirrorsare determinative factors for the evaluations of the product performanceand quality.

Therefore, what is desired is a method and apparatus for measuringelectromechanical responses of micromirror devices.

SUMMARY OF THE INVENTION

The objects and advantages of the present invention will be obvious, andin part appear hereafter and are accomplished by the present inventionthat provides a method and apparatus for operating pixels of spatiallight modulators in display systems. Such objects of the invention areachieved in the features of the independent claims attached hereto.Preferred embodiments are characterized in the dependent claims. In theclaims, only elements denoted by the words “means for” are intended tobe interpreted as means plus function claims under 35 U.S.C. § 112, thesixth paragraph.

BRIEF DESCRIPTION OF DRAWINGS

While the appended claims set forth the features of the presentinvention with particularity, the invention, together with its objectsand advantages, may be best understood from the following detaileddescription taken in conjunction with the accompanying drawings ofwhich:

FIG. 1 is a perspective view of a portion of a micromirror array devicein which embodiments of the invention can be implemented;

FIG. 2 is a cross-sectional view of a portion of the spatial lightmodulator in FIG. 1 with the mirror plates thereof at different rotationpositions;

FIG. 3 demonstratively illustrates an exemplary image of a portion ofthe micromirrors in FIG. 1;

FIG. 4 schematically illustrates a typical electromechanical responsecurve of a micromirror device in FIG. 1;

FIG. 5 schematically illustrates an experimental setup for measuring theelectromechanical responses of the micromirror array device in FIG. 1according to an embodiment of the invention;

FIG. 6 is a flow chart showing the steps executed for measuring theelectromechanical responses of the micromirrors in FIG. 1 according tothe embodiment of the invention;

FIG. 7 a is a flow chart showing the steps executed for loading themicromirror array device into the experimental setup;

FIG. 7 b is a flow chart showing the steps executed for setting themeasurement parameters;

FIG. 7C is a flow chart showing the steps executed for detecting thegeometric centers of the individual micromirrors of the micromirrorarray device;

FIG. 8 demonstratively illustrates a voltage profile of a voltagescanning scheme for use in measuring the electromechanical responses ofthe micromirrors according to an embodiment of the invention;

FIG. 9 demonstratively illustrates a voltage scanning scheme having aset of voltage sequences for use in measuring the electromechanicalresponses of the micromirrors according to another embodiment of theinvention;

FIG. 10 demonstratively illustrates another voltage scanning schemehaving a set of voltage sequences for use in measuring theelectromechanical responses of the micromirrors according to yet anotherembodiment of the invention;

FIG. 11 demonstratively illustrates yet another voltage scanning schemehaving a set of voltage sequences for use in measuring theelectromechanical responses of the micromirrors according to yet anotherembodiment of the invention;

FIG. 12 schematically illustrates a simplified computing system for usein performing the methods of the invention.

FIG. 13 demonstratively illustrates an user-interface used forcontrolling the vacuum of the experimental setup;

FIG. 14 demonstratively illustrates an user-interface used for aligningthe micromirrors of the micromirror array device to the experimentalsetup;

FIG. 15 demonstratively illustrates a user-interface used for measuringthe electromechanical responses of the micromirrors with selectedvoltage scanning schemes according to the invention; and

FIG. 16A is a top view of another micromirror array device in which theembodiment of the invention can be implemented; and

FIG. 16B is a perspective view of yet another micromirror array devicein which the embodiment of the invention can be implemented.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

The invention provides a method and apparatus for evaluating the productquality and performances of micromirror array devices throughmeasurements of the electromechanical responses of the individualmicromirrors to the driving forces of electric fields. Theelectromechanical responses of the micromirrors according to the presentinvention are described in terms of the rotational angles associatedwith the operational states, such as the ON and OFF state angles of theON and OFF state when the micromirror array device is operated in thebinary-state mode, and the response speed (i.e. the time intervalrequired for a micromirror device to transit form one state to another)of the individual micromirrors to the driving fields.

Specifically, a driving force is applied to the mirror plate of amicromirror being tested. In response, the mirror plate is deflected todifferent rotational angles determined by the amplitude and polarity ofdriving forces and the intrinsic mechanical and electrical properties ofthe micromirror being tested. The deflection of the mirror plate ismonitored in a real-time fashion through the measurement of theintensities of the reflected light from the deflected mirror platebecause the intensities of the reflected light are determined by thedeflected positions of the individual mirror plates. And the dynamicvariations of the intensities over time carry the information on theresponse speed of the mirror plate to the applied driving force.Therefore, from the intensities and the variation of the intensities ofthe reflected light, the electromechanical response of the micromirrorto the driving force can be extracted. The same measurement can beconducted for all micromirrors of the micromirror array device, fromwhich the electromechanical responses, such as the ON and OFF stateangles and the response speed of all micromirrors of the micromirrorarray device can be obtained. Based on the extracted parameters, as wellas predetermined criteria, the quality and performance of themicrostructure device can be evaluated. For example, if all micromirrorsof the micromirror array device have substantially the same ON and OFFstate angle and substantially the same response speed, or the ON and OFFstate angles and the response speed thereof have variations withinrespective predefined ranges, the micromirror array device may beacceptable as a “good” product. Otherwise, the micromirror array deviceis not acceptable and is marked as a “bad” product.

The measured electromechanical responses, in turn can be used as basesfor optimizing the driving forces in practical operations of themicrostructure devices. For example, the measurement results can be usedto determine the optimum amplitudes and/or the profiles of the drivingvoltages for the micromirror array device in practical operations.

The corresponding experimental setup for measuring the electromechanicalresponses of the micromirror array device comprises an illuminationsystem providing collimated light for illuminating the mirror plates ofthe micromirrors, an image capture device (e.g. a CCD device) fordetecting intensities of the reflected light from the mirror plates ofthe micromirrors, and a set of optical elements for directing the light.A computing device having capacities of data process and control ofother functional components of the experimental setup can also beprovided for facilitating automated measurements in accordance with themethods of the invention. In particular, a plurality of program modulesare constructed to perform the operations of, image analyses fordetermining the centers of the mirror plates, accepting parameters fromthe user for instructing controlling the applications of the drivingforces to the mirror plates, analyzing the intensities of the reflectedlight from the mirror plates so as to extracting electromechanicalresponse information of the individual micromirrors, and generatingplots as appropriate. These program modules can be stored in andexecuted by the computer.

The measurement of the electromechanical responses of the micromirrorsis preferably performed under a pressure lower than 1 atmosphere, suchas around 20 Torr or less, or around 50 mTorr or less, or 15 mTorr orless.

In addition to micromirror devices, the present invention is applicableto other type of microelectromechanical devices having deflectablereflective planar members. For simplicity and demonstration purposesonly, the present invention will be discussed with reference to amicromirror array device, such as a spatial light modulator having anarray of micromirrors, each of which has a deflectable reflective mirrorplate. Those skilled in the art will certainly appreciate that thefollowing examples are not be interpreted as a limitation. Rather, othervariations within the spirit of the invention are also applicable.

Turning to the drawings, FIG. 1 illustrates a perspective view of aportion of a micromirror array device 100. The micromirror array devicecomprises micromirror array 106 and electrode and circuitry array 108.Each micromirror has a mirror plate that is held by a hinge (e.g. atorsion hinge) such that the mirror plate can rotate along a rotationaxis. According to an embodiment of the invention, the mirror plate ofeach micromirror can rotate from a natural resting state (e.g. parallelto the substrate) to 8° degrees or more, or 10° degrees or more, or 12°or more, or 14° degrees or more.

In this particular example, the micromirrors and electrodes andcircuitry are formed on separate substrates. Specifically, themicromirrors are formed on substrate 102 that is light transmissive,such as glass, while the electrodes and circuitry are formed onsubstrate 104 that is a standard semiconductor wafer. The semiconductorwafer having the electrodes and circuitry is places proximate to theglass substrate having the micromirrors such that the mirror plate canbe rotated by an electrostatic force established between the mirrorplate and the electrode. Instead of on separate substrates, themicromirrors and the electrodes and circuitry can be formed on the samesubstrate, such as a semiconductor wafer. In another embodiment of theinvention, the micromirror substrate can be formed on a transfersubstrate that is light transmissive. Specifically, the micromirrorplate can be formed on the transfer substrate and then the micromirrorsubstrate along with the transfer substrate is attached to anothersubstrate such as a light transmissive substrate followed by removal ofthe transfer substrate and patterning of the micromirror substrate toform the micromirror.

The micromirrors operate in binary-mode, that is, the mirror plates ofthe micromirrors switch between an ON and OFF state in performing thelight modulation. In the ON state, the mirror plate of the micromirrorreflects incident light so as to generate a “bright” pixel on a displaytarget; and in the OFF state, the mirror plate reflects the incidentlight so as to generate a “dark” pixel on the display target. In anumber of embodiments of the invention, the micromirror array isconstructed having a pitch (the center-to-center distance betweenadjacent micromirrors) of 25 micrometers or less, or 10.16 micrometersor less, or from 4.38 to 10.16 micrometers. The gap between adjacentmicromirrors is approximately of 0.5 micrometers or less, or from 0.1 to0.5 micrometer. And the mirror plate of the micromirror has a dimensionof from 20 micrometers to 10 micrometers.

For simplicity purposes, only 4×4 micromirrors are illustrated in thefigure. Oftentimes, the micromirror array device has more micromirrors.For example, when the micromirror array device is a portion of a spatiallight modulator of a display system, it may have millions ofmicromirrors, the number of which determines the resolution of thedisplay system. For example, the spatial light modulator may have aresolution of 1024×768 or higher, or 1280×1024 or higher, or 1640×1280or higher. Of course, the micromirror array device may have a fewernumber of micromirrors than in display, or other applications.

The operations of the individual micromirrors are determined by therotations of the individual mirror plates in response to the appliedelectrostatic forces. Such responses can be described in terms of therotation angles of the mirror plates and the speeds of the responses tothe electrostatic forces. The mirror plate rotates under anelectrostatic force. For a given micromirror device, the angle that themirror plate can be rotated is determined by the amplitude of theelectrostatic field. When the micromirror is operate in a binary-stateincluding the ON and OFF state, particular rotational angles are desiredfor the ON and OFF state. Accordingly, the electrostatic forces fordriving the mirror plate to the ON and OFF state angles need to bedetermined. Moreover, the time characteristic of the mirror plate intransition from one state to another is also a critical factor, whichdetermines the quality of the displayed images, especially the videoimages.

In order to evaluate the product quality and performance of themicromirror array device in terms of the electromechanical responses tothe electrostatic forces, the dynamic rotational behaviors of theindividual mirror plates in the presence of the driving forces aremeasured through the measurements of the intensities of the reflectedlight from the individual mirror plates, and the variations of theintensities over time, which will be discussed in detail in thefollowing with reference to FIG. 2.

Referring to FIG. 2, the spatial light modulator in FIG. 1 isillustrated in a cross-sectional view. The deflectable reflective mirrorplates are held by deformable hinges that are formed on glass substrate102. Electrodes and circuitry (not shown) are formed on thesemiconductor substrate 104 for deflecting the mirror plates. Forexample, the mirror plate of micromirror 110 can be rotated in a spatialdirection by an electrostatic force established between the mirror plateand electrode 112 that is associated with the mirror plate. Thecollimated incident light 118 is redirected into reflected light 120after reflection. Depending upon the incident angle of the light and therotation angle of the mirror plate, reflected light can be along theperpendicular direction as shown in the figure. For a micromirrorwithout application of the driving force, such as micromirror 114 havingno electrostatic force established between the mirror plate thereof andelectrode 116, the mirror plate is at the natural resting state, such asparallel to the substrate, as shown in the figure. The collimatedincident light 118 is thus reflected to reflected light 122 that travelsalong a different direction from reflected light 120. On image capturedevice 124, such as a CCD device that is placed on top of themicromirrors, reflected light 120 generates a “bright” pixel, whilereflected light generates a “dark” pixel. That is, the illuminationintensity of the image generated by the reflected light 120 is higherthan that of reflected light 122. In turn, the rotational positions ofthe mirror plates can be deducted from the intensities of thecorresponding image on the image capture device.

As a simplified example, FIG. 3 schematically illustrates a capturedimage of a set of micromirrors of the micromirror array device at atime. Each image cell (e.g. cells 130, 128, 132, and 134) is an image ofa mirror plate and is generated by the reflected light from the mirrorplate. When the micromirror is at the ON state, the corresponding imagecell is “bright”; while the image cell is “dark” when the micromirror isat the OFF state. That is, the darkness of the image cell reflects therotational positions of the mirror plate of the micromirror. For theparticular example in the figure, the cells with the shaded solidcircles have higher illumination intensities (“bright” image cells) thanthose otherwise. Accordingly, the mirror plates corresponding to thecells having the shaded solid circles are rotated to an angle of the ONstate, whereas the mirror plates corresponding to the cells having noshaded circles stay at the OFF state. Specifically, the mirror platescorresponding to the cells within the matrix with the corners of 130,128, 134, and 132 are in the ON state, and the remaining mirror platesare in the OFF state. In generating such an image, electrostatic fieldsare applied to the mirror plates individually for rotating the mirrorplate. Because the ON and OFF rotational angles are determined by theamplitudes of the electrostatic forces; and the ON and OFF state anglescan be monitored from the intensities of the image cells of the mirrorplates, the ON and OFF state voltages can thus be associated with anddeducted from the intensities of the image cells of the captured image.The voltages associated with the ON and OFF states are often referred toas the ON and OFF state voltages, respectively. Therefore, the ON andOFF state voltages can be measured from the measurements of the lightintensities of the corresponding image cells.

In addition to the “brightness” of the image cells of the micromirrors,variation of the “brightness” of the image cells over time carries theinformation of the response speed of the micromirror to theelectrostatic forces. For example, when a driving force is applied tothe mirror plate of a micromirror at the OFF state, the mirror plate isrotated from the OFF state to the ON state. Accordingly, the image cellof the mirror plate changes from “dark” to “bright.” Clearly, the speedof the mirror plate in transiting from the OFF to the ON state isassociated with the time interval of the image cell changing from “dark”to “bright.”

With a given electrostatic force, the mirror plate has certain responsecapability. FIG. 4 plots the rotation angles vs. the voltage applied tothe mirror plate of a typical micromirror device. Both axes in the plotare in arbitrary units. During the course of upwards voltage sweepingfrom zero (0) voltage, the rotation angle increases with the increase ofthe voltage along branch {circle around (1)}. At voltage V_(snap), themirror plate rotates to an angle of _(snap). Above V_(snap), therotation angle starts to saturate. In general, the ON state voltage isdefined as a small amount higher than the V_(snap), and thecorresponding rotation angle is defined as the ON state angle _(ON).During the course of downwards voltage sweeping from V_(ON), responsehysteresis occurs. Specifically, the rotation angle decreases with thedecrease of the voltage but along branch {circle around (2)}. AroundV_(st), the rotation angle drops to a value after which the rotationangle starts to decrease slowly. In general, the OFF state voltage canbe defined as a small amount lower than voltage V_(st).

In order to determining the responses of the individual micromirrors todriving electrostatic forces, an experiment setup according to anembodiment of the invention is provided. Referring to FIG. 5, anexemplary experimental setup for performing the method of the presentinvention is schematically illustrated. System 136 comprises lightsource 138 with attached fiber optic cable 142 connected to microscopeobjective 144, neutral density filter 146, diffuser 152, condenser lens148, vacuum chamber 150 in which micromirror device 100 is placed,sample holder 151, image capture device 124, and computing device 154.The light source can be DC bulbs (e.g. halogen light bulbs) or LED orother type of light sources. The vacuum chunk may be connected toappropriate vacuum instruments, such as pumps and valves. Sample holder151 can be constructed in any suitable forms. For example, the sampleholder can be a flat surface on which the sample device can be attachedand held. The sample holder can also have a supporting surface on whichthe sample device to be measured can be attached and hold. Thesupporting surface is preferably movable 3-dimentionally. For example,in addition to the ability of moving in the X-Y plane, the supportingsurface can be tilted at any desired angles. In this way, the sampledevice attached to the supporting surface can be rotated. In particular,the reflective surface of the sample device can be tilted asdesired—facilitating adjustment of the propagation direction of thereflected light. Moreover, the sample holder can be equipped with anautomation system, such as a motor, along with a position detector. Inthis way, the movement of the supporting surface of the sample holdercan be automated, and the position of the supporting surface can bedetermined precisely.

In accordance with an embodiment of the invention, the components of thesystem in FIG. 5 are arranged according to the configuration of thedevice to be measured. For example, when a micromirror array devicehaving an array of deflectable reflective mirror plates is to bemeasured, the image capture device is desired to be positioned in thepropagation path of the reflected light when the mirror plates are at aparticular state. For example, mirror plate can rotate to an ON stateangle and an OFF state angle, or not rotated (e.g. parallel to thesubstrate on which the micromirror is formed). The image capture devicecan thus be positioned in the propagation path of the reflected lightfrom the mirror plate at the ON state angle, the OFF state angle orparallel to the substrate. When the image capture device is positionedin the propagation path of the reflected light from the mirror plate atthe ON state, the detected illumination intensity of the reflected lightwill increase as the mirror plate rotates towards the ON state angle.When the photodetector is positioned in the propagation path of thereflected light from the mirror plate parallel to the substrate, thedetected illumination intensity decreases as the mirror plate rotatestowards the ON state angle. As a way of example, the image capturedevice can be positioned at a location wherein an imaginary lineconnecting the device to be measure has an angle to the incidentillumination light, wherein the angle can be 0° degree, 10° degrees ormore, 12° degrees or more, 14° degrees or more, 16° degrees or more, 18°degrees or more, 20° degrees or more, and 22° degrees or more.

The light source emits a beam of light for the measurement system. Thelight has a wavelength substantially less than the minimum dimensions ofthe mirror plate. The light from the light source is conducted to themicroscope objective through the fiber optic cable. The microscopeobjective forms a point light source and emitting light passing throughthe diffuser. The condensing lens preferably having a 6″ or 8″diametercollimates the diffused light and illuminates the micromirror devicewithin the vacuum chamber. The incident light onto the micromirrordevice is reflected by the mirror plates of the micromirrors. Thereflected light passes through the neutral density filter and iscollected by the condensing lens and focused into the image capturedevice. The image capture device can be a display target, a CCD, or anyother type of devices having the function of capturing images.

Operations of the functional members of the system, such as the vacuumchamber and the associated vacuum instruments, the image capture deviceand the optical elements, can be controlled by computing device 154 thathas appropriate computer-executable instructions for performing thecontrolling, which will be discussed afterwards. Specifically, thecomputing device can generate instructions for adjusting the relativepositions of the illumination system (e.g. light objective 144), themicromirror device in the vacuum chamber, and the image capture devicesuch that each and every regions of the micromirror device can beilluminated, and the reflected light such each and every regions can becaptured by the image capture device. In this embodiment, a motorizedstage can be attached to the micromirror device so as to smoothly andaccurately move the micromirror device. Moreover, the computing devicehas a connection to the image capture device for retrieving the imagedata from the image capture device and then analyzing the image data.

The method of the present invention can be implemented in many ways. Inthe following, an exemplary procedure according to the method of theinvention for measuring the dynamic electromechanical response of themicromirrors will be discussed with reference to FIGS. 6 through 12. Theprocedure can also be implemented in the computing device for beingautomatically executed. For this purposes, a set of programmablefunctional modules are provided for interfacing the user, which will bediscussed in detail afterwards with reference to FIGS. 13 through 15.

FIG. 6 is a flow chart that presents the steps executed for performingthe measurement procedure according to the method of the invention. Theprocedure starts from loading the micromirror device into themeasurement system (step 156). In fact, more than one spatial lightmodulators, such as 16 or more spatial light modulators can be loadedinto the system at a measurement with each spatial light modulator hasan array of micromirrors. Before loading, the micromirror device mayhave passed one or more inspections, such as inspection with naked eyes,or other uniformity inspections, as set forth in U.S. patent applicationSer. No. 10/875,602 filed Jun. 23, 2004, now U.S. Patent ApplicationPublication No. 2005-0286044 and U.S. patent application Ser. No.10/875,555 filed Jun. 23, 2004, now U.S. Pat. No. 7,345,806. Both werefiled on the on the same day as the current patent application, and thesubject matter of each being incorporated herein by reference.

In order to individually drive the micromirrors with electrostaticforces during measurements, the micromirrors are connected toappropriate driving circuits that may be embedded within the measurementsystem or installed outside the measurement system. The loading step mayhave further steps, as shown in FIG. 7 a.

Referring to FIG. 7, the micromirrors are loaded into the vacuum chamber(e.g. vacuum chamber 150 in FIG. 5) (step 166). According to anembodiment of the invention, the measurement is preferably performedwithin an environment having a pressure under 1 atmosphere, morepreferably around 20 Torr or less, or 50 mTorr or less, or 15 mTorr orless. This is performed at step 168, in which step the vacuum chamber ispumped out to the desired pressure.

Referring back to FIG. 6, after the micromirrors to be measured aresecurely installed in the measurement system with the desired pressure,an image of the micromirrors is taken by the image capture device (step158). In taking the image, all micromirrors in the inspection area areturned to the ON state such that the cells corresponding to themicromirrors under inspection have certain level of illuminationintensities. As in the example in FIG. 3, the micromirrors correspondingto the cells within the matrix having the corners 128, 130, 132, and 134are under inspection at a time. Though as illustrated therein forsimplicity and demonstration purposes only, the number of micromirrorsunder inspection (i.e. inspected simultaneously) at a time can be 35×35or more, or 128×92 or more. Given the inspection region, the locationsof the micromirrors in the inspection region are precisely determinedand recorded (step 160 in FIG. 6). For this purposes, the centers of themirror plates of the micromirrors in the inspection region aredetermined.

The centers of the micromirrors can be determined in many ways. As a wayof example, FIG. 7 c shows the steps execute in finding the centers ofthe image cells of the micromirrors in the inspection region. Startingfrom step 192, the edges of the image cells of the individualmicromirrors are calculated. The edge detection of an image can beaccomplished in many ways. According to an embodiment of the invention,a Siebel operator is applied to the captured image for the purposes ofedge detection. After the edge detection, both horizontal and verticaledges of the image cells corresponding to the micromirrors are obtained.Following the edge detection, noise filtering step 194 can be optionallyperformed so as to remove or reduce the noise of the image. According tothe embodiment of the invention, the image is further processed in theFourier space. Therefore, a Fourier transformation is applied to theimage at step 196. In the Fourier space, the peaks of the image arelocated (step 198). Given the peak positions, the pitches and rotationangles of the mirror plates are calculated in the Fourier space (step200) with the pitch sizes include both pitch sizes along vertical andhorizontal directions. Such calculated pitch sizes may be different atdifferent locations in the image. As an optional feature, a plurality ofpitch sizes at different locations of the image can be calculated andthen averaged. Such averaged pitch size can be used as the pitch sizesof the entire micromirror array. Specifically, the image is divided intosub-images (step 202). Then the pitch sizes in the sub-images areaveraged at step 204. With the calculated pitch sizes and the detectededges of the image cells of the individual micromirrors, the geometriccenters are determined at steps 208 and 210. According to theembodiment, the geometric center detection is performed in thereal-space. Therefore, the Siebel transformation following the Fouriertransformation is applied to the image so as to transform the image fromthe Fourier space back into the real-space (step 206). At step 207, thegeometric centers are detected. Given the geometric centers, the edges,and the pitch sizes of the image cells of the individual micromirrors,the positions of the centers of all micromirrors of the micromirrorarray device in the measurement system can be calculated (step 210).

Given the coordinates of the centers of the mirror plates(micromirrors), each mirror plates in the inspection region can beprecisely located. In particular, the rotation positions of the mirrorplate can be derived from the illumination intensities at the centers ofthe corresponding images, as shown by the shaded solid circles in FIG.3. Moreover, the micromirrors being inspected can be individuallyidentified.

Returning back to FIG. 6, following the image analyses for determiningthe centers of the micromirrors, a set of measurement parameters aredetermined (step 162), which is more detailed in FIG. 7 b. Referring toFIG. 7 b, information on the micromirrors, such as the identificationnumber(s) is made of record (step 164). The coordinates of themicromirrors at the corners of the inspection region are saved such thateach micromirror in the inspection region can be located. In the exampleof the image as shown in FIG. 3, the coordinates of the micromirrors128, 130, 132, and 134 are recorded. When combined with otherparameters, such as the pitch sizes along the column and row, thecoordinates of each micromirror in the inspection region can then bedetermined. This is of particular importance when the measurement is tobe performed automatically with the computing device, in which case, thecomputing device is capable of measuring the micromirrors sequentiallybased on the coordinates of the micromirrors.

In order to measure the dynamic responses of the individualmicromirrors, a suitable voltage scan scheme is selected (step 168). Thescheme defines the voltage scan profile and related parameters. Fordemonstration purposes, four (4) different voltage-scan schemestargeting at detecting different aspects of the dynamic responses of themicromirrors to the driving electrostatic forces will be described inthe following. It will be appreciate that other suitable voltage scanschemes without departing from the spirit of the invention are alsoapplicable. For example, a voltage scan scheme combining the two or moreof the following discussed voltage scan schemes or the like areapplicable.

FIG. 8 illustrates a voltage scan profile of a static scan schemeaccording to an embodiment of the invention. This scan profile isparticular useful for measuring the ON and OFF state angle of themicromirror. The profile comprises a positive voltage increase edge fromtime 0 to t_(Max) followed by a positive voltage decrease edge from timet_(Max) to T_(1/2). The two edges may or may not be symmetric along thet_(max) axis. As an optional feature, the profile may also comprise anegative voltage increase edge from time T_(1/2) to t_(−Max) followed bya negative voltage decrease edge from time t-_(max) to T₀. Similarly,the two edges may or may not be symmetric along the t-_(max) axis.However, it is preferred that the triangular voltage profiles0−V_(max)−T_(1/2) and T_(1/2)−(−V_(Max))−T₀ are symmetric around thepoint (T=T_(1/2), V=0), even though not required. As a way of example,t_(max) can be from 3 to 10 sec, or from 10 sec to 50 sec, or from 50 to100 sec, or from 100 to 200 sec or more. V_(max) can be from 10 to 25volts, or from 25 to 45 volts, or from 45 to 100 volts, or more.

During the voltage sweeping from T=0 to T=T₀, the illumination intensityof the image cell corresponding to the mirror plate to which the voltageis applied is monitored in the real-time fashion. For the variation ofthe illumination intensity, the rotation position of the mirror plate isthus dynamically detected. Specifically, when the mirror plate isrotated to the ON state angle, the illumination intensity is maximized.To obtain the voltage for the ON state angle of the micromirror, thevoltage is swept upwards from V=0 at T=0. When then voltage reaches toV=V_(on) at time t_(ON), it is observed that the illumination intensityis maximized. Therefore, such voltage V_(on) is defined as the ON statevoltage. For security reasons, the voltage can be further increased asmall amount to V_(Max) at time t_(Max). The voltage is then sweptdownwards from V=V_(max) at T=t_(max). At V=V_(off) at time T=t_(off),it is observed that the illumination intensity of the image cellcorresponding to the mirror plate is minimized. It is indicated that themirror plate is turned to the OFF state, such as a state when the mirrorplate is in the natural resting state or parallel to the substrate. Sucha voltage V_(OFF) is defined as the voltage corresponding to the OFFstate. For further ensuring that the mirror plate is returned to the OFFstate, the voltage is decreased a small amount further, such as to V=0at T=T_(1/2). In the above voltage scanning scheme, a positive voltageis applied to the mirror plate to rotate the mirror plate. In contrast,a negative voltage can also be applied to the mirror plate to achievethe same effect. Specifically, the voltage sweeping can be continued attime T=T_(1/2) towards the negative direction. When the negativesweeping voltage reaches V=−V_(ON) at time T=t_(−on), it is observedthat the illumination intensity of the image cell corresponding to themirror plate is maximized. Accordingly, voltage V=V_(−ON) is defined asthe voltage for the OFF state. The voltage is swept a small amountfurther to V_(max) at time T=T_(−max) to ensure the definition of theOFF state voltage. The sweeping voltage is then swept downwards at timeT=t_(−max). When the sweeping voltage is at V=−V_(off), it is observedthat the illumination intensity of the image cell corresponding to themirror plate is minimized. Such voltage is then defined as the voltagefor the OFF state. For ensuring the defined voltage for the OFF state,the sweeping voltage is swept a small amount further such as V=0 atT=T₀.

The observed ON and OFF state voltages in different sweeping directionscan be compared so as to obtain the electromechanical property of themicromirror. An ideal micromirror is expected to have symmetric ON andOFF state voltages. Specifically, the ON state voltage V_(on) obtainedfrom the positive voltage sweeping has the same absolute value as the ONstate voltage obtained from the negative voltage sweeping. That is|V_(on)|=|−V_(on)|. The same for the OFF state voltages,|V_(off)|=|−V_(off)|.

The measurement is then repeated for the remaining micromirrors in theinspection region. After the measurements of the micromirrors in oneinspection region, the inspection region is shifted to cover anothergroup of micromirrors followed by the measurements. The measurementprocess is repeated until the desired electromechanical responses of allmicromirrors in the spatial light modulator are obtained. After thecompletion of the measurement of one spatial light modulator, themeasurement can be continued on another spatial light modulator.Specifically, multiple spatial light modulators can be placed in themeasurement system as shown in FIG. 5 according to an embodiment of theinvention. This is of particular importance when the measurement isperformed in a vacuum chamber (e.g. vacuum chamber 150 in FIG. 5),because in this way, the measurement can be continuously performed forall the spatial light modulators without extra efforts in reloadingspatial light modulators after each measurement.

With the measured electromechanical responses (e.g. the ON and OFF statevoltages) of the micromirrors in a spatial light modulator, the qualityand performance can be evaluated. Specifically, if all micromirrors havethe same ON and OFF state voltage, or the variation of the ON and/or OFFstate voltages is within a predefined range, it can be said that themicromirror array device is acceptable. Otherwise, the micromirror arraydevice is an inferior product, which can be discarded.

The measured ON and OFF state voltages, in turn, can be used forcalibrating and optimizing the driving voltages for a quality product ofthe micromirror array device in operation. According to the invention,the ON state voltage (V_(on)) for driving the micromirrors in operationis calculated from the measured ON state voltages such that the mirrorplate has the “fastest” response to the driving force V_(on). Toaccomplish this, the response speed of the mirror plate needs to bemeasured, which will be discussed afterwards.

In addition to the driving voltage profile in FIG. 8, the dynamicelectromechanical response of the micromirrors can also be measured withother driving voltage scan schemes, such as that shown in FIG. 9.Referring to FIG. 9, the voltage scan scheme comprises a set of drivingvoltage sequences, 10A, 10B, 10C, and 10D and many other similarsequences (not shown in the figure). Each voltage sequence comprises aset of pulse structures (duty cycles) each of which further comprises apeak having a width of T₁ followed by another peak with a width of T₂.Both T₁ and T₂ are longer than the required time for the mirror plate torotate to the ON state. The peak T₁ has a height of V_(max) equivalentto the V_(max) in FIG. 8. This peak is designated for pulling the mirrorplate of the micromirror being tested to the maximum angle of the mirrorplate. The peak of T₂ immediately following the peak T₁ has a heightvarying over time. The voltage increment of the peak at T₂ can be of anysuitable value depending upon the desired precision, such as 1% or lessof V_(max).

During each duty cycle of a voltage sequence, the mirror plate is pulledto its maximum rotation angle by the voltage pulse at T₁. At time t₂,the voltage on the mirror plate drops to V_(i) and remains at the mirrorplate for a time period of T₂. If the voltage V_(i) is less than thevoltage required to rotate the mirror plate to the ON state, the mirrorplate departs from the ON state to its natural resting state. In thecorresponding image cell, the illumination intensity decreases. However,when the voltage V_(i) during T₂ reaches or is larger than the ON statevoltage, the mirror plate stays at the ON state. Accordingly, theillumination intensity of the image cell remains the same. From suchmeasurement, the ON state voltage can be obtained.

As a way of example, voltage sequences 10A to 10D are applied to themirror plate of the micromirror being tested. The voltage pulse at T₂ ofeach duty cycle in the sequences before 10C is less than the ON statevoltage. The voltage pulse at T₂ of sequence 10C is equal to the ONstate voltage, and the voltage pulse at T₂ of each duty cycle in thesequences after sequence 10C is larger than the ON stage voltage. Thevoltage sequences can be applied sequentially to the micromirrorstarting from sequence 10A. Because the voltage pulses at T₂ are lessthan the ON state voltage, the illumination intensity of the image cellcorresponding to the micromirror being tested decreases during timeperiods T₂ when the voltage sequences 10A to 10B are applied. When thevoltage sequence 10C is applied, the illumination intensity of the imagecell changes during T₂ time intervals, indicating that the voltage at T₂is equal to or larger than the ON state voltage. If the increment of thevoltage at T₂ of sequence 10C from that in the applied voltageimmediately prior to sequence 10C is small enough, the voltage at T₂ ofsequence 10C is substantially the ON state voltage. For ensuring thatthe voltage at T₂ of sequence 10C is the ON state voltage, additionalvoltage sequences 10D can be applied.

In accordance with another embodiment of the invention, the voltagesweeping scheme can be inversed. Specifically, instead of applying theabove voltage sequences in an increased order of the peak at T₂, thesequences can be applied in a decreased order. For example, sequence 10Dcan be applied before sequence 10C that can be followed by sequences 10Band 10A and other sequences consecutively.

Referring to FIG. 10, another voltage scanning scheme for measuring theelectromechanical responses of the micromirrors is illustrated therein.According to the scheme, voltage pulses of different voltages values aresequentially applied to the mirror plate of the micromirror beingtested. Specifically, the scheme consists of a set of voltage sequences,and different sequences have voltage pulses of different values. Thevoltage sequences can be applied to the mirror plate in an increased ora decreased order of the voltages. For example, the scheme consists ofvoltage sequences 11A, 11B, 11C, and 11D. The voltage pulses V_(m) in11A is less than those in other sequences. The voltage pulses in 11B arehigher than that in 11A, but lower than those in 11C and 11D. Forsimplicity and demonstration purposes, only four (4) voltage sequencesare presented in FIG. 11. In practical, more voltage sequences can beprovided and applied in an appropriate order. In fact, the total numberof the voltage sequence depends upon the desired precision.

As a way of example, the voltage sequences can be applied to the mirrorplate in an order of 11A, 11B, 11C, and 11D with the voltage valuesincreased. Assuming that before the application of sequence 11C (i.e.during the applications of sequences 11A and 11B), the illuminationintensities of the image cell corresponding to micromirror being testedyield a “dark” image, whereas the application of sequence 11C results ina “bright” image cell. It can then be determined that the ON statevoltage of the micromirror is the voltage V_(ON) in sequence 11C.Because the voltage sequences are applied to the micromirrors with thevoltages thereof increased, the micromirror responses to the sequencesof voltages along branch {circle around (1)} in FIG. 4. The voltagesequences can also be applied in an inversed order, such as from 11D to11C, then 11B followed by 11A.

The ON and OFF state voltages describe one aspect of theelectromechanical response of a micromirror. Another aspect of theelectromechanical response of a micromirror can be described in terms ofthe response speed to the ON and OFF state voltages. Specifically, theresponse speed measures the time interval of the micromirror intransition from one state to another under a given driving voltage (e.g.the ON state voltage). According to an embodiment of the invention, thespeed response can be measured with a voltage scanning scheme having avoltage scanning profile as shown in FIG. 11.

Referring to FIG. 11, the voltage scanning scheme consists of a set ofvoltage sequences, such as 12A, 12B, 12C, and 12D. The voltage plusesmay have the same height, such as V_(on) or V_(max). The period T, thusthe frequency of the voltage pulses is the same for all voltagesequences. In one voltage sequence, the widths of the voltage pulses Ware the same. But the widths are different in different voltagesequences. The increment of the W for the voltage sequencesconsecutively applied to the micromirror is predetermined, such as 1% orless of the applied maximum voltage V_(max).

In a typical measurement with the driving voltages shown in FIG. 11, thevoltage sequences are applied to the mirror plate being tested, whilethe illumination intensity of the image cell corresponding to themicromirror is monitored at the same time. As a way of example, assumingthe speed response of the micromirror corresponds to the voltage pulsewidth W of the voltage sequence 12C, voltage sequences (e.g. 12A and12B) having the pulse widths less than that of sequence 12C will resultin a “dark” image cell of the micromirror. When the voltage sequence 12Cis applied to the micromirror, it is observed that the illuminationintensity of the image cell of the micromirror is maximized, resultingin a “bright” image cell. For ensuring that the natural speed responseof the micromirror corresponds to the pulse width W of voltage sequence12C, additional voltage sequences, such as 12D can be applied to themicromirror in test, wherein the pulse width of sequence 12D is largerthan that of sequence 12C. It should be point that, the four (4) voltagesequences in the figure are presented therein for demonstration andsimplicity purposes only. In practice, more voltage sequences can beprovided and applied to the micromirror, for example, between sequences12A and 12C, and between sequences 12C and 12D.

After obtaining the speed responses of one micromirror, the samemeasurement is performed for another in the inspection region and theremaining micromirrors sequentially. Moreover, the same measurementprocedure is carried out for another group of micromirrors in thespatial light modulator after the completion of the measurement in oneinspection area until all the micromirrors of the spatial lightmodulator are tested. Because the measurement system as shown in FIG. 5allows for loading multiple spatial light modulators (e.g. six) at onetime, the measurement can be continued for the rest spatial lightmodulators.

Returning to FIG. 8, the voltage scan scheme is selected (e.g. from theschemes as discussed above with references to FIGS. 8 through 11) atstep 168 of step 162 in FIG. 6. Returning back to FIG. 6, the dynamicelectromechanical responses of the micromirrors are then measured atstep 164 according to the parameters set at step 162. Following themeasurements, the measurement results are then analyzed (step 165) so asto obtain the quantitative descriptions of the electromechanicalresponses of the micromirrors, such as the ON and OFF state angles, theON and OFF state voltages (V_(on) and V_(off)) and the response speed ofthe micromirrors under given driving voltages. In particular, an ONstate voltage V_(on) is obtained from the quantitative descriptions suchthat the micromirrors of the micromirror array device have the “fastest”response under V_(on) in average. The analyze step (step 165) can beconducted after the completion of the measurements for the micromirrorsof the entire micromirror array device. Alternatively, the measurementscan be conducted during the measurement. For example, the analysis canbe performed after each measurement of a micromirror, or after themeasurements of a group of micromirrors (e.g. the micromirrors in theinspection region), or after the measurements of the micromirrors of theentire micromirror array device, or at a later time after themeasurements.

The measurement procedure may loop back to step 162 for performing themeasurements for another group of micromirrors of the micromirror arraydevice, or for the micromirrors on another micromirror array device inthe measurement system until all the micromirrors of all desiredmicromirror array devices are measured.

After the completion of the measurements, the micromirror array devicesare unloaded from the measurement system (step 167). In performing theunloading, the vacuum chamber of the measurement system is vented beforeunloading.

In the above discussion, a homogeneous illumination light beam incidentonto the micromirrors is preferred. However, such homogeneous light beammay not always be ready. When an inhomogeneous light beam is used forilluminating the system, reflected light from the mirror plates of themicromirrors will not be homogeneous either, and the accuracy of themeasured light intensities from the individual micromirrors can bedegraded. Moreover, the intensities of the reflected light from themicromirrors may be out of the acceptable range of the photodetector, inwhich way, the detected illumination intensity of the reflected lightwill not be accurate. Even with a homogeneous illumination light beam,the detected intensity of the illumination system may not be accuratedue to noise of the captured images of the micromirrors in thephotodetector.

An approach to solve this problem is to calibrate the illuminationintensity of the light source as disclosed in the invention. Moreover,the solution may include a solution to depress the noise in the capturedimages generated by the photodetector. According to an embodiment of theinvention, an image of the micromirrors is taken by the photodetectorwhen the light source is turned off. The illumination intensity of thebackground noise in captured image is analyzed and recorded. Themicromirror array device under inspection is then replaced by areference wafer, such as a glass plate preferably having a reflectiveindex higher than that of the micromirror array device. A referenceillumination intensity is then measured for the reference wafer with thelight source turned on. The noise intensity and the reference intensityare respectively defined as the minimum and maximum illuminationintensities allowed by the photodetector. The measured illuminationintensity of the reflected light in a practical measurement is thenscaled within the dynamic intensity range between the minimum andmaximum illumination intensities.

According to an embodiment of the invention, measurement procedures asdiscussed above can be implemented in a computing device, such ascomputing device 154 in FIG. 5. Specifically, the computing devicecontrols the components of the measurement system based on theinteraction with users, or based on the control information storedtherein so as to perform the measurement procedure. The control can beaccomplished through executions of a plurality of computer readableinstructions generated from a plurality of functional modules. FIG. 12schematically illustrates one exemplary computing device forimplementing embodiments of the invention. Although such devices arewell known to those of skill in the art, a brief explanation will beprovided herein for the convenience of other readers.

Referring to FIG. 12, in its most basic configuration, computing device180 typically includes at least one processing unit 182 and memory 184.Depending on the exact configuration and type of computing device,memory 184 can be volatile (such as RAM), non-volatile (such as ROM,flash memory, etc.) or some combination of the two.

Additionally, device 180 may also have other features and/orfunctionality. For example, device 180 could also include additionalremovable and/or non-removable storage including, but not limited to,magnetic or optical disks or tape, as well as writable electricalstorage media. Such additional storage is illustrated in FIG. 12 byremovable storage 186 and non-removable storage 188. Computer storagemedia includes volatile and nonvolatile, removable and non-removablemedia implemented in any method or technology for storage of informationsuch as computer readable instructions, data structures, program modulesor other data. The memory, the removable storage and the non-removablestorage are all examples of computer storage media. Computer storagemedia includes, but is not limited to, RAM, ROM, EEPROM, flash memory orother memory technology, CDROM, digital versatile disks (DVD) or otheroptical storage, magnetic cassettes, magnetic tape, magnetic diskstorage or other magnetic storage devices, or any other medium which canbe used to store the desired information and which can accessed by thedevice. Any such computer storage media may be part of, or used inconjunction with, the device.

The device may also contain one or more communications connections 190that allow the device to communicate with other devices (such as theother functional modules in FIG. 5). The communications connectionscarry information in a communication media. Communication mediatypically embodies computer readable instructions, data structures,program modules or other data in a modulated data signal such as acarrier wave or other transport mechanism and includes any informationdelivery media. The term “modulated data signal” means a signal that hasone or more of its characteristics set or changed in such a manner as toencode information in the signal. By way of example, and not limitation,communication media includes wired media such as a wired network ordirect-wired connection, and wireless media such as acoustic, RF,infrared and other wireless media. As discussed above, the term computerreadable media as used herein includes both storage media andcommunication media.

For facilitating the automatic control of the measurements system forexecuting the desired measurement procedures with the computing device,a set of User-Interfaces (UI) are provided according to the invention.FIG. 13 illustrates UI 170 through which parameters associated with thesample loading (e.g. step 156 shown in FIG. 6) can be defined.Specifically, UI 170 provides vacuum control panel 172 for enabling theuser to control the vacuum of the system. For example, the user mayactivate “Vent” for ventilating vacuum chamber 150 in FIG. 5. This isoften executed after each measurement and/or before loading one or morenew sample into the vacuum chamber. The user may activate “Idle” formaintaining the vacuum system at its current state. When the sample(e.g. spatial light modulators) are securely loaded into the vacuumchamber of the system, the user may instruct the system to pumping outthe vacuum chamber to a desired pressure level, such 1 atmosphere orlower, or 20 Torr or less, or 50 mTorr or less, or 15 mTorr or less.This can be accomplished by activating “Pump.” When the system reachesthe desired measurement environment (e.g. the desire pressure), the usermay instruct the system to maintain its current state by activating“Idle.” The desired measurement can then be performed. After thecompletion of the measurements, the user may instruct the measurementsystem to ventilating the vacuum chamber so as to unload the sample. Theventilation of the vacuum system can be done with the activation of“Vent.”

Before (or after) performing the measurement, information for uniquelyidentifying the sample to be measured can be recorded in panel 174 asshown in the figure. This information will be associated with themeasurements results of the sample and can be stored in the computingdevice or other type of storages.

In performing measurement, the rotational positions of the mirror platesof the micromirrors are detected through the measurements of theillumination intensities of the corresponding image cells. To accomplishthis, the image cells, especially the centers of the image cells arerequired to be aligned to the physical centers of the mirror plates whenthe mirror plates are at their natural resting states, such as parallelto the substrate. Accordingly, an alignment control mechanism isnecessary. For this reason, align control UI 176 is provided and anexemplary of which is presented in FIG. 14.

Referring to FIG. 14, align control UI 176 consists of a navigatecontrol panel and an align control panels. The navigate control panelfurther comprises motional control panel, in which motion direction keysare provided. Through the motion direction keys, the sample (e.g. thespatial light modulator in the vacuum chamber) and/or the illuminationsystem (e.g. 144 in FIG. 5) can be relatively moved in “left”, “right”,“up” and “down” directions so as to accomplish the alignment. Themovement can control through other control fields provided by thenavigate panel. For example, the “Amount” field, which consists of atext-input field allows for the user to indicate the movement incrementwith a unit defined in the “Unit” field that also comprises a text-inputfield. In addition to step-movement, the navigate panel further providesa “Move to” function for enabling the alignment of the illuminationsystem with any micromirror in the inspection field. Specifically, the“Move to” field consists of a field of “X number” in which the Xcoordinate (in terms of the number of micromirrors) of the mirror plateto be aligned is indicted, and a field of “Y number” in which the Ycoordinate (in terms of the number of micromirrors) of the mirror plateto be aligned is indicted. In addition to the position control, thenavigate control panel also provides the function for controlling theoptical elements of the measurements system so as to obtain the bestquality image of the micromirrors. Specifically, a “Focus Control” isprovided for controlling the optical elements, such as projection lens144, 146, 148, and 152.

When the micromirrors of spatial light modulator being tested arealigned with the illumination system, the inspection region, as well asthither position information needs to be defined. Accordingly, the aligncontrol panel provides an “Align” panel as shown in the figure. The“Align” panel consists of a “Corner” panel in which the coordinates ofthe micromirrors at the four (4) corners of the spatial light modulatorare defined. As an example of a spatial light modulator having 1024×768micromirrors, the coordinates of the micromirror at the top-left cornerof the spatial light modulator can be set as (−1,−1). The coordinates ofthe micromirror at the top-right corner can be set as (1024,−1). Thecoordinates of the micromirror at the bottom-right corner can be set as(1024, 768), and the coordinates of the micromirror at the bottom-leftcorner can be set as (−1, 768). These coordinates of the cornermicromirrors can be stored through activation “Save corners” in thepanel. Alternatively, the coordinates of the corner micromirrors can beloaded from storage through the activation of “Load Corners.” Inaddition to indicating the coordinates of the corner micromirrors withnumbers, the “Align Control” panel also provides “Mouse Control”function enabling the user to control the alignment with a mouse of thecomputing device.

In performing the measurement, a voltage scanning scheme is defined,such as in step 162 of the flow chart in FIG. 6. The voltage scanningscheme can be defined through UI 178 as shown in FIG. 15. Referring toFIG. 15, UI 178 comprises “Polarity” panel, “Voltage scan test settings”panel, “Data analysis settings” panel, “Alternative scan settings”panel, and other related functional and operational buttons, such as“Start voltage scan”, “save voltage scan”, and “Analyze scan results”and an “Intensity threshold” text-input field, and “Alternative scansettings” panel.

The “Polarity” panel provides users with a plurality of options, such as“Positive” and “Negative” for enabling the users to indicate thepolarity of the driving voltages. The driving voltages used for themeasurements, such as those illustrated in FIG. 8 through 11, arefurther defined in the “voltage scan test settings” panel. Specifically,the voltage scan scheme can be selected from a plurality of providedoptions. As an example, the user may use “Sequence 1” and “Sequence 2”panels to define the voltage scan sequence as shown in FIG. 8.Specifically, the upward scanning portion can be defined in the“Sequence 1” panel. The “Voltage Min A,” “Voltage Max B” and “VoltageMin C” fields respectively define the starting voltage, the maximumvoltage V_(max) and the ending voltage. The downwards voltage scanningportion of voltage profile can be defined with “Sequence 2” panel. The“Voltage Min D,” “Voltage Max E” and “Voltage Min F” respectively definethe starting voltage the downwards scanning voltage, the maximum voltagein the negative voltage direction, and the returning voltage. The slopof scanning voltage profile can be defined in the “Voltage step” field,which can be a text-input field.

The “data analysis settings” panel is provided for defining the numberof micromirrors in the inspection area. For example, the measurementsetup and the method according to the invention enable 20 or more, or35×35 or more, or 128×92 or more micromirrors being included in theinspection area.

In addition to the voltage profile in FIG. 8, other voltage profiles,such that in FIG. 9 can also be defined, for example, through the“Alternative scan settings” panel. In particular, the starting voltagecan be defined in the text-input filed “Min Voltage;” the voltage peakof T₂ can be defined in the text-input filed “Mid Voltage;” and thevoltage peak of T₁ can be defined in the text-input filed “Max Voltage.”The “Voltage step 1” defines the voltage increment step of the voltagepeak of T₂. In fact, the “Alternative scan settings” panel can also beused to defining the voltage profile in FIG. 11 by, fro example, settingthe “Min Voltage” and “Mid Voltage” fields to zero, and the “VoltageStep 1” to a desired voltage increment step. The scanning voltage havingthe profile defined above can be activated and applied to themicromirrors during measurements by checking the “Use Alt Voltage Scan.”

Given the selected and defined voltage scan scheme and scanning voltageprofile, the measurement can be initiated by activating the functionalbutton of “Start voltage scan.” After each scan for either a micromirroror the micromirrors within the defined inspection area or themicromirrors of the spatial light modulator, the scanned results can besaved through activation of the functional button of “Save voltagescan.” The results can then be analyzed by activating the functionalbutton of “Analyze scan results.” In the measurement, the rotationalpositions of the mirror plates are detected through the measurements ofthe intensities of the reflected light from the mirror plates, which ismeasured through the captured images of the mirror plates. For betterpresenting such intensities in the image, an intensity threshold isdetermined for filtering out the intensities beyond the threshold. As aresult, the centers of the mirror plates are more discernable; and theintensities around the center if the mirror plate image can be moreaccurately compared with each other.

In addition to selection of the scanning voltages from the predefined(or provided) options, the method and experimental setup including UI178 according to the invention also enable the user to perform themeasurements with any desired voltage scanning schemes or scanningvoltage profiles. This can be accomplished through the definition of thevoltage profile with UI 178, which will not be discussed in detailherein.

In addition to the implementation in the micromirror devices as shown inFIG. 1, the present invention can also be implemented in measuring othertype of micromirror array devices, such as those illustrated in FIGS.16A and 16B.

Referring to FIG. 16A, the micromirrors are arranged in the micromirrorarray such that the micromirrors in the array are titled—that is theedges of the mirror plate of each micromirror in the array are neitherparallel to the edges of the micromirror array nor parallel to the edgesof the micromirror array device, as set forth in U.S. patent applicationSer. No. 10/698,563 to Patel, filed on Oct. 30, 2003, the subject matterbeing incorporated herein by reference.

Referring to FIG. 16B, another micromirror array device in whichembodiments of the invention can be implemented is illustrated therein.The mirror plates of the micromirrors in the micromirror array each havezigzagged edges. An advantage of such a mirror plate is that theunexpected light scattering can be reduced, thus, the contrast ratio ofthe displayed images can be improved. Similar to that in FIG. 1, themicromirrors can be formed on a light transmissive substrate 184, whichcan be glass. The electrode and circuitry array can be formed onsemiconductor substrate 186 for addressing and actuating themicromirrors. Alternatively, the micromirrors and the electrodes can beformed on the same substrate, such as a semiconductor substrate.

It will be appreciated by those of skill in the art that a new anduseful method and a system for qualitatively evaluating product qualityof microelectromechanical devices have been described herein. In view ofthe many possible embodiments to which the principles of this inventionmay be applied, however, it should be recognized that the embodimentsdescribed herein with respect to the drawing figures are meant to beillustrative only and should not be taken as limiting the scope ofinvention. For example, the micromirror array device can be a part of apackaged device. The device package may have the micromirror arraydevice being hermetically or non-hermetically sealed within the package.Those of skill in the art will recognize that the illustratedembodiments can be modified in arrangement and detail without departingfrom the spirit of the invention. Therefore, the invention as describedherein contemplates all such embodiments as may come within the scope ofthe following claims and equivalents thereof.

APPENDIX A A Brief Description of the Sobel Detector

The Sobel operator performs a 2-D spatial gradient measurement on animage and so emphasizes regions of high spatial gradient that correspondto edges. Typically it is used to find the approximate absolute gradientmagnitude at each point in an input grey-scale image.

In theory at least, the operator consists of a pair of 3×3 convolutionmasks as shown in the following. A brief description of the convolutionoperator is attached in Appendix B. One mask is simply the other rotatedby 90°.

$\underset{Gx}{\begin{matrix}{- 1} & 0 & {+ 1} \\{- 2} & 0 & {+ 2} \\{- 1} & 0 & {+ 1}\end{matrix}}$ $\underset{Gy}{\begin{matrix}{+ 1} & {+ 2} & {+ 1} \\0 & 0 & 0 \\{- 1} & {- 2} & {- 1}\end{matrix}}$

Sobel Convolution Masks

These masks are designed to respond maximally to edges runningvertically and horizontally relative to the pixel grid, one mask foreach of the two perpendicular orientations. The masks can be appliedseparately to the input image, to produce separate measurements of thegradient component in each orientation (call these Gx and Gy). These canthen be combined together to find the absolute magnitude of the gradientat each point and the orientation of that gradient. The gradientmagnitude is given by:

|G|=√{square root over (Gx ² +Gy ²)}

Although typically, an approximate magnitude is computed using:

|G|=|Gx|+|Gy|

which is much faster to compute.

The angle of orientation of the edge (relative to the pixel grid) givingrise to the spatial gradient is given by:

θ=arctan(Gy/Gx)−3π/4

In this case, orientation 0 is taken to mean that the direction ofmaximum contrast from black to white runs from left to right on theimage, and other angles are measured anti-clockwise from this. Often,this absolute magnitude is the only output the user sees—the twocomponents of the gradient are conveniently computed and added in asingle pass over the input image using the pseudo-convolution operatorshown in the following figure.

$\begin{matrix}P_{1} & P_{2} & P_{3} \\P_{4} & P_{5} & P_{6} \\P_{7} & P_{8} & P_{9}\end{matrix}$

Pseudo-Convolution Masks Used to Quickly Compute Approximate GradientMagnitude

Using this mask the approximate magnitude is given by:

∥G|=(P ₁+2×P ₂ +P ₃)−(P ₇+2×P ₈ +P ₉)|+|(P ₃+2×P ₅ +P ₉)−(P ₁+2×P ₄ +P₇)|

APPENDIX B A Brief Description of Convolution

Convolution is a simple mathematical operation which is fundamental tomany common image processing operators. Convolution provides a way of‘multiplying together’ two arrays of numbers, generally of differentsizes, but of the same dimensionality, to produce a third array ofnumbers of the same dimensionality. This can be used in image processingto implement operators whose output pixel values are simple linearcombinations of certain input pixel values.

In an image processing context, one of the input arrays is normally justa greylevel image. The second array is usually much smaller, and is alsotwo dimensional (although it may be just a single pixel thick). Thefollowing shows an example image and kernel that we will use toillustrate convolution.

$\begin{matrix}I_{11} & I_{12} & I_{13} & I_{14} & I_{15} & I_{16} & I_{17} & I_{18} & I_{19} \\I_{21} & I_{22} & I_{23} & I_{24} & I_{25} & I_{26} & I_{27} & I_{28} & I_{29} \\I_{31} & I_{32} & I_{33} & I_{34} & I_{35} & I_{36} & I_{37} & I_{38} & I_{39} \\I_{41} & I_{42} & I_{43} & I_{44} & I_{45} & I_{46} & I_{47} & I_{48} & I_{49} \\I_{51} & I_{52} & I_{53} & I_{54} & I_{55} & I_{56} & I_{57} & I_{58} & I_{59} \\I_{61} & I_{62} & I_{63} & I_{64} & I_{65} & I_{66} & I_{67} & I_{68} & I_{69}\end{matrix}$ $\begin{matrix}K_{11} & K_{12} & K_{13} \\K_{21} & K_{22} & K_{23}\end{matrix}$

An example small image (left) and kernel (right) for illustratingconvolution. The labels within each grid square are used to identifyeach square.

The convolution is performed by sliding the kernel over the image,generally starting at the top left corner, so as to move the kernelthrough all the positions where the kernel fits entirely within theboundaries of the image. (Note that implementations differ in what theydo at the edges of images as explained below.) Each kernel positioncorresponds to a single output pixel, the value of which is calculatedby multiplying together the kernel value and the underlying image pixelvalue for each of the cells in the kernel, and then adding all thesenumbers together.

So in this example, the value of the bottom right pixel in the outputimage will be given by:

O ₅₇ =I ₅₇ K ₁₁ +I ₅₈ K ₁₂ +I ₅₉ K ₁₃ +I ₆₇ K ₂₁ +I ₆₈ K ₂₂ +I ₆₉ K ₂₃

If the image has M rows and N columns, and the kernel has m rows and ncolumns, then the size of the output image will have M−m+1 rows, andN−n+1 columns. Mathematically we can write the convolution as:

${O\left( {i,j} \right)} = {\sum\limits_{k = 1}^{m}{\sum\limits_{l = 1}^{n}{{I\left( {{i + k - 1},{j + l - 1}} \right)}{K\left( {k,l} \right)}}}}$

wherein i runs from 1 to M−m+1 and j runs from 1 to N−n+1.

Note that many implementations of convolution produce a larger outputimage than this because they relax the constraint that the kernel canonly be moved to positions where it fits entirely within the image.Instead, these implementations typically slide the kernel to allpositions where just the top left corner of the kernel is within theimage. Therefore the kernel overlaps' the image on the bottom and rightedges. One advantage of this approach is that the output image is thesame size as the input image. Unfortunately, in order to calculate theoutput pixel values for the bottom and right edges of the image, it isnecessary to invent input pixel values for places where the kernelextends off the end of the image. Typically pixel values of zero arechosen for regions outside the true image, but this can often distortthe output image at these places. Therefore in general if you are usinga convolution implementation that does this, it is better to clip theimage to remove these spurious regions. Removing n−1 pixels from theright hand side and m−1 pixels from the bottom will fix things

1. A method of evaluating a quality of a micromirror array device havingan array of micromirrors, each micromirror having a deflectablereflective mirror plate, the method comprising: (a) dynamicallymeasuring a mechanical response of a mirror plate of a micromirror inthe micromirror array in response to an altering driving force; (b)determining an instant driving force of the altering driving force underwhich the mirror plate is at a desired state of the measured mechanicalresponse; (c) repeating steps (a) and (b) for a number of othermicromirrors in the micromirror array; and (d) evaluating the quality ofthe micromirror array device based on the determined instant drivingforces.
 2. The method of claim 1, wherein the step of dynamicallymeasuring the mechanical response further comprises: applying analtering voltage to the mirror plate; and dynamically measuring asequence of rotation positions of the mirror plate in response to thealtering voltage.
 3. The method of claim 2, wherein step of determiningthe instant driving force further comprises: determining an instantvoltage of the altering voltage under which the mirror plate is at an ONstate.
 4. The method of claim 3, wherein the ON state is a state whereinthe mirror plate is rotated 10° degrees or more relative to a substrateon which the mirror plate is formed.
 5. The method of claim 4, whereinthe ON state is a state wherein the mirror plate is rotated 12° degreesor more relative to the substrate.
 6. The method of claim 5, wherein theON state is a state wherein the mirror plate is rotated 14° degrees ormore relative to the substrate.
 7. The method of claim 2, wherein thealtering voltage comprises an upward sweeping edge and a downwardsweeping edge, wherein the mirror plate rotates towards an ON stateduring the upwards sweeping edge, and rotates towards an OFF stateduring downwards sweeping edge.
 8. The method of claim 7, wherein theOFF state is a state wherein the mirror plate is parallel to a substrateon which the mirror plate is formed.
 9. The method of claim 2, whereinthe altering voltage comprises a sequence of voltage cycles, each ofwhich comprises a first and second voltage peak with the first voltagepeak having an amplitude higher than a voltage required for rotating themirror plate to an ON state, and the second voltage peak having anamplitude that varies over time.
 10. The method of claim 9, wherein thefirst voltage peak of a voltage cycle is applied to the mirror plateimmediately prior to the application of the second voltage peak of thesame cycle.
 11. The method of claim 9, wherein the second voltage peakof a voltage cycle is applied to the mirror plate immediately prior tothe application of the first voltage peak of the same cycle.
 12. Themethod of claim 2, wherein the altering voltage comprises a sequence ofvoltages, the amplitude of each of which varies over time.
 13. Themethod of claim 2, wherein the altering voltage comprises a set ofvoltage sequences, each voltage sequence having a sequence of voltagepulses, wherein a time interval between two consecutive voltage pulsesvaries over time.
 14. The method of claim 2, further comprising:directing a light beam to the mirror plates of the micromirrors in themicromirror array; taking an image of the illuminated micromirrors;processing the image so as to obtain an edge of each illuminatedmicromirror; and selecting a micromirror to be measured.
 15. The methodof claim 1, further comprising: loading the micromirror array deviceinto a vacuum chamber of a measurement system; and pumping out thevacuum chamber to a particular pressure.
 16. The method of claim 15,wherein the particular pressure is 1 atmosphere or less.
 17. The methodof claim 15, wherein the particular pressure is 20 Torr or less.
 18. Themethod of claim 15, wherein the particular pressure is 50 mTorr or less.19. The method of claim 14, wherein step of dynamically measuring themechanical response further comprises: dynamically measuring anintensity of a light beam reflected from the mirror plate beinginspected; and from the detected illumination intensity, determiningwhether the mirror plate reaches to the desired state.
 20. The method ofclaim 14, wherein the step of processing the image further comprises:transforming the image into the Fourier space; locating a plurality ofpeaks in the image; approximating a horizontal and vertical pitches ofthe mirror plate according to the located peaks; performing the Fouriertransformation to the images; and calculating a geometric center of eachmirror plate in the micromirror array.
 21. The method of claim 20,wherein the step of approximating the horizontal and vertical pitchesfurther comprises: approximating the horizontal and vertical pitchesusing the Siebel operator.
 22. The method of claim 21, furthercomprising: filtering a noise of the image before transforming the imageinto the Fourier space.
 23. The method of claim 21, further comprising:filtering a noise of the image immediately after the transformation ofthe image into the Fourier space.
 24. The method of claim 13, furthercomprising: measuring a response time for each micromirror in themicromirror array during which the illumination intensity changesbetween a minimum value to a maximum value in response to the alteringvoltage; and evaluating the quality of the micromirrors based upon themeasured response time for all micromirrors of the micromirror array.25. The method of claim 24, wherein the step of evaluating the qualityfurther comprises: calculating a distribution of the response time ofthe micromirrors; and evaluating the quality based upon the calculateddistribution.
 26. The method of claim 3, further comprising: calculatinga distribution of the measured instant voltages for the micromirrors,wherein the instant voltage of a micromirror is the ON state voltage;and evaluating the quality of the micromirrors based upon the calculateddistribution.
 27. The method of claim 1, wherein the step of evaluatingthe quality further comprises: passing the micromirror array device ifthe determined instant driving force is within a predetermined range;and failing the micromirror array device if the determined instantdriving force is beyond the predetermined range.
 28. The method of claim2, wherein the altering voltage has a maximum value of from 10 to 70volts.
 29. The method of claim 2, wherein the altering voltage has amaximum value of from 25 to 45 volts.
 30. The method of claim 2, whereinthe altering voltage has a maximum value of from 70 to 100 volts. 31.The method of claim 14, wherein the step of taking an image of theilluminated micromirrors further comprises: capturing a reflected lightfrom the illuminated micromirrors in a propagation path of the reflectedlight, wherein said propagation path of the reflected light has an anglewith a propagation path of the illumination light incident onto themicromirrors; and wherein the angle is 10° degrees or more.
 32. Themethod of claim 31, wherein the angle is 14° degrees or more.
 33. Themethod of claim 31, wherein the angle is 16° degrees or more.
 34. Themethod of claim 31, wherein the angle is 18° degrees or more.
 35. Themethod of claim 31, wherein the angle is 20° degrees or more.
 36. Themethod of claim 31, wherein the angle is 22° degrees or more. 37-70.(canceled)